Werth 3D Fiber Probe® 3D-WFP

Ultra-precise tactile and optical micro 3D fiber probe

Name: Werth Fiber Probe® WFP 3D
Brand: Werth

Ultra-high-precision measurement of 3D ultrafine structures

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Technical specifications

센서 원리Tactile-optical

Accuracy (MPE)0.25 µm

Operating principle

Using image processing sensors (a) cameras, (b) LEDs for lighting) and optical distance sensors (c) the measurement measures the horizontal and vertical variations of the illuminated probe tip (e) when the measuring object moves. The exact position of the probe tip (d) at the target variable overlaps with the coordinates of the measuring scale system and is stored as a measuring point or used for scanning. Exchange units with flexible holding elements (g) are also provided with a dual-sphere probe (h).

Key benefits

(Patented) Contact and Optics Microdimensional probes extend the application of verified Werth Fiber Probe® technology to the 3D field. They have several advantages over conventional microprobes based on mechanical and electrical principles. WFP® is much stronger against damage, offers microwave tips of at least 20um diameter, and the propulsion force is several times lower (<0.1mN). Werth Fiber Probe® is one of Werth's technical distinctions for microphotometry.

The measurements using 3D fiber probes are performed in both single point mode and scanning mode, with a special probe system for scanning mode, and a spiral scan along a pre-set contour to reliably detect profile changes in the measuring surface, and a microprobe in angular form for internal image measurement, and a dual ball stylus (also licensed) to prevent adjustment related measurement errors. When combined with a corresponding three-dimensional accuracy meter such as Werth VideoCheck® UA, WFP® 3D realises the 0.25um level of supply gap.