Werth Messtechnik JiMEAS Technology Corp.
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Wafer.

The circular silicon disk that's the basis of IC.

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The circular silicon disk that's the basis of IC.

The most important geological characteristic of a wave measurement is the flatness of the surface, which is checked along with the inclusion of the material inside the wave and the surface damage. Also, the measurement speeds required for process monitoring are often very high, and it is key to ensure stable measurement reproduction within short cycle times. Werth's multi-sensor coordinate metrology technology combines the optical, contact and baseline sensor into one coordinate, allowing for a high-speed assessment of the surface wave's flatness and micro-defects simultaneously, thus capturing the precise data needed for the control of the half-body precision ratio.

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